Reaction Engineering Modeling of Low-Pressure Metalorganic Chemical Vapor Deposition of Nb_2O_5 Thin Film

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-06-15

著者

• IMAISHI Nobuyuki

  Institute of Advanced Material Study, Kyushu University

• Jung Sang-chul

  Interdisciplinary Graduate School Of Engineering Science Kyushu University

• Park Heung-chul

  Department Of Chemical Technology Chonnam National University

• Imaishi Nobuyuki

  Institute Of Advanced Material Study Kyushu University

関連論文

• Observation of Periodic Marangoni Convection in a Molten Silicon Bridge on board the TR-IA-6 Rocket (TR-IA6号機特集(1))
• EXPERIMENTAL AND NUMERICAL ANALYSES OF CRYSTALLIZATION PROCESSES OF In_Ga_Sb UNDER DIFFERENT GRAVITY CONDITIONS
• Melt Mixing of the 0.3In/0.7GaSb/0.3Sb Solid Combination by Diffusion under Microgravity
• Numerical Simulation of Oxide Melt Flow in a Crucible with a Constant Temperature Side Wall
• Three-Dimensional Oscillatory Marangoni Flow in Half-Zone Liquid Bridges of Pr=1 Fluid
• Measurement of Temperature Fluctuations in Marangoni Convection in a Half-zone Silicon Melt on Board the TR-IA-4 Rocket (特集 TR-IA4号機)
• Nonlinear Oscillations of Molten Silicon Drops in Electromagnetic Levitator
• Reaction Engineering Modeling of Low-Pressure Metalorganic Chemical Vapor Deposition of Nb_2O_5 Thin Film
• Transition Phenomena on Marangoni Convection in Low Pr Number Liquid Bridge
• TRANSITION OF FLOW MODE IN A MODEL CZ MELT
• MARANGONI CONVECTION IN A LIQUID BRIDGE UNDER MICROGRAVITY CONDITIONS DURING PARABOLIC FLIGHT
• GLOBAL ANALYSIS OF HEAT TRANSFER IN CZ CRYSTAL GROWTH OF OXIDE
• INTERFACIAL CONTAMINATION CAUSED BY WATER ON MARANGONI CONVECTION IN A SILICONE OIL LIQUID BRIDGE
• A THEORETICAL STUDY OF THE TEMPERATURE FIELD IN A PANCAKE CVD REACTOR
• EFFECT OF A FUNNEL-SHAPED RADIATION SHIELD ON THE CHARACTERISTICS OF A SILICON CZ FURNACE
• Properties of molten silicon for numerical simulations
• Shape of Film Grown on Microsize Trenches and Holes by Chemical Vapor Deposition: 3-Dimensional Monte Carlo Simulation
• Modeling of Tungsten Thermal Chemical Vapor Deposition
• Melt Mixing of the 0.3In/0.7GaSb/0.3Sb Solid Combination by Diffusion under Microgravity
• Theoretical and experimental studies of the deformation of bubbles moving in quiescent Newtonian and non-Newtonian liquids.
• Effect of interface inversion on thermal stress field in CZ crystal growth of oxide.
• Effect of a radiation shield on thermal stress field during Czochralski crystal growth of silicon.

もっと見る 閉じる

スポンサーリンク