A THEORETICAL STUDY OF THE TEMPERATURE FIELD IN A PANCAKE CVD REACTOR
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概要
- 論文の詳細を見る
For the pancake CVD reactor, a mathematical model for global analysis of beat transfer in the reactor was developed, and the effects of the geometry and location of the RF coil and the frequency of the RF current on the temperature distributions in the reactor, especially on the susceptor, were investigated.It is found that the heat generation rate in the susceptor is strongly affected by the location of the RF coil and the current frequency, and that the temperature variation on the susceptor is large with the plane RF coil. Also, by modifying the geometry of the RF coil, the temperature distributions on the susceptor can be easily improved.
- 社団法人 化学工学会の論文
- 1992-12-01
著者
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IMAISHI Nobuyuki
Institute of Advanced Material Study, Kyushu University
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TSUKADA Takao
Institute for Chemical Reaction Science, Tohoku University
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HOZAWA Mitsunori
Institute for Chemical Reaction Science, Tohoku University
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Imaishi N
Kyushu Univ. Fukuoka Jpn
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Tsukada Takao
Institute For Chemical Reaction Science Tohoku University
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Imaishi Nobuyuki
Institute Of Advanced Material Study Kyushu University
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Hozawa M
Tohoku Univ. Sendai
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Hozawa Mitsunori
Institute For Chemical Reaction Science Tohoku University
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