EFFECT OF A FUNNEL-SHAPED RADIATION SHIELD ON THE CHARACTERISTICS OF A SILICON CZ FURNACE
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概要
- 論文の詳細を見る
For the 6″ silicon CZ system, effects of a funnel-shaped radiation shield on the temperature profiles in the melt and crystal, the melt/crystal interface shape and also the distribution of the thermal stresses were investigated theoretically by the finite element analysis based on the conduction-dominated model.It is found that a funnel-shaped radiation shield can make the melt/crystal interface less convex to the crystal (relatively flatter), providing a higher pull rate and smaller thermal stresses in the crystal compared with other radiation shield geometries, such as a doughnut (torus) shape. Also, the principal operating conditions in the CZ system, such as the crucible temperature, can be changed widely by selecting the emissivity and/or thickness of the shield.
- 社団法人 化学工学会の論文
- 1992-02-20
著者
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IMAISHI Nobuyuki
Institute of Advanced Material Study, Kyushu University
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TSUKADA Takao
Institute for Chemical Reaction Science, Tohoku University
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HOZAWA Mitsunori
Institute for Chemical Reaction Science, Tohoku University
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Imaishi N
Kyushu Univ. Fukuoka Jpn
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Honda Koji
Institute Of Advanced Material Study Kyushu University
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Tsukada Takao
Institute For Chemical Reaction Science Tohoku University
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Imaishi Nobuyuki
Institute Of Advanced Material Study Kyushu University
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Hozawa M
Tohoku Univ. Sendai
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Hozawa Mitsunori
Institute For Chemical Reaction Science Tohoku University
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