Reliability Improvement of Thin Oxide by Double Deposition Process of Silicon Using Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-01
著者
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Park Jin
Department of Internal Medicine, Sejong General Hospital
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Park J
Hanyang Univ. Kyunggi‐do Kor
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CHEON Chae
Department of Materials Engineering, Hoseo University
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Cheon Chae
Department Of Materials Engineering Hoseo University
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Park Jin
Department Of Anatomy Ajou University School Of Medicine
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Cheon Chae
Department of Digital Display Technology, Hoseo Unversity, Chungnam 336-795, Korea
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