Higher Frequency Shifts of a Surface Vibration Mode Accompanied by Native Oxide Growth on Silicon in Air
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概要
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A surface polar vibration mode of native oxide formed on a silicon surface exposed to air has been found to shift continuously to the higher frequency side, after being dipped in diluted hydrogen fluoride solution and rinsed in deionized water, using infrared spectroscopy. The surface mode has a longitudinal character. The shifts strongly indicate an increase in the depolarization electric field accompanied by the spreading growth of "native oxide islands" on the silicon surface.
- 社団法人応用物理学会の論文
- 1994-01-15
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関連論文
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- Higher Frequency Shifts of a Surface Vibration Mode Accompanied by Native Oxide Growth on Silicon in Air
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