Compact High-Density Plasma Source Produced by Using Standing Helicon Waves

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概要

• 論文の詳細を見る

• High-density plasmas of the order of 10^<13> cm^<-3> are produced by the m=0 standing helicon wave (SHW) in a short discharge column (10 cm). Unlike conventional helicon wave discharges, high-density plasma production is split into two modes governed by N=1 and 3 (N is the number of half-wavelengths in the plasma column) SHWs. The external static magnetic field B_0 dependence of plasma density n_p shows that N=3 SHW can produce a density higher than N=1 SHW at low magnetic field (〜200 G). The standing waves are measured and compared using a two-dimensional wave calculation.

• 社団法人応用物理学会の論文
• 1999-07-01

著者

• SHOJI Tadayoshi

  Department of Electronics, Tohoku Institute of Technology

• Shoji T

  Department Of Electronics Tohoku Institute Of Technology

• Shoji Tatsuo

  Department Of Energy Engineering And Science Nagoya University

• SAKAWA Youichi

  Department of Energy Engineering and Science, Nagoya University

• Nisoa Mudtorlep

  Department Of Physics Nagoya University

• Sakawa Y

  Nagoya Univ. Nagoya Jpn

• Sakawa Youichi

  Department Of Energy Engineering And Science Nagoya University

• Nisoa Mudtoriep

  Department of Physics, Nagoya University

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