Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping : Etching and Deposition Technology
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-01-31
著者
-
Sugioka Koji
Riken The Institute Of Physical And Chemical Research
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Toyoda Koichi
Riken The Institute Of Physical And Chemical Research
関連論文
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- Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping
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- Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping : Etching and Deposition Technology
- Direct Formation of Three-Dimensional Structures in GaAs by Excimer Laser Doping