Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-10-20
著者
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TOYODA Koichi
RIKEN, The Institute of physical and Chemical Research
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SUGIOKA Koji
Riken, The Institute of Physical and Chemical Research
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Sugioka Koji
Riken The Institute Of Physical And Chemical Research
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Toyoda Koichi
Riken The Institute Of Physical And Chemical Research
関連論文
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- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
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- FIB Exposure Characteristics of LB Film
- Crystal Growth of Nd:YAG Laser Films on Various Substrates by Pulsed Laser Deposition
- Maskless Etching of AN Using Focused Ion Beam
- Maskless Ion Beam Assisted Etching of Si Using Chlorine Gas
- Measurement of the Energy Spread of the Cold Relativistic Electron Beam Using Thomson Backscattering of a High Power CO_2 Laser
- Selective Etching of AI_2O_3 on GaAs using Excimer Lasers : Etching
- Selective Etching of Al_2O_3 on GaAs using Excimer Lasers
- Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping
- Vacuum-ultraviolet laser induced surface modification of fused quartz
- Efficient Amplification of an Optically Pumped NH_3 Laser at 11.707 μm
- Si Barrier Metal Growth by Hybrid Radical Beam-Pulsed Laser Deposition of TiN
- Direct Formation of Three-Dimensional Structures in GaAs by Excimer Laser Doping : Beam Induced Physics and Chemistry
- Control of Surface Color of Stainless Steel 304 by KrF Excimer Laser Implant Deposition
- Laser Oscillation at 5378 Å by Laser-Produced Cadmium Plasma
- Self-Aligned Microfabrication of Metal-Semiconductor Contacts by Projection-Patterned Excimer Laser Doping : Etching and Deposition Technology
- Direct Formation of Three-Dimensional Structures in GaAs by Excimer Laser Doping