Inhomogeneous Concentration Distribution in Obliquely Evaporated Fe-Cu Films

概要

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A distribution of atoms or local concentration in Fe_xCu_<1-x> films prepared by an oblique incident beam is discussed based on the results of the magnetization, Mossbauer effect, X-ray diffraction and simulation of a film-formation process. From these experiments, it was concluded that an inhomogeneous concentration distribution takes place in a column which is formed by oblique incidence. In each column three kinds of regions (Fe, Fe-Cu and Cu) are found, depending on the iron contents (x) and the incidence angles (θ). When θ is small, only an Fe-Cu region appears; this is an Fe-rich (bcc) or Cu-rich (fcc) alloy corresponding to large or small x, respectively. When θ is large, Fe and Cu regions appear in stead of Fe-Cu regions; also, x affects the volume ratio of the Fe to Cu regions.
社団法人応用物理学会の論文
1986-11-20