A Static Model for Scratches Generated during Aluminum Chemical-Mechanical Polishing Process : Orbital Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-04-15

著者

• Yang Jinfeng

  Sumitomo Heavy Industries Ltd.

• Yang J

  Department Of Ee University Of South Carolina

• Yang J

  Ipec

• MEURIS Marc

  IMEC vzw

• ZHONG Lei

  IPEC

• YANG Jerry

  IPEC

• HOLLAND Karey

  IPEC

• GRILLAERT Joost

  IMEC

• DEVRIEND Katia

  IMEC

• HEYLEN Nancy

  IMEC

• Meuris M

  Imec

• Meuris Marc

  Imec

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• A Static Model for Scratches Generated during Aluminum Chemical-Mechanical Polishing Process : Orbital Technology
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