Meuris Marc | Imec
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概要
関連著者
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MEURIS Marc
IMEC vzw
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Meuris Marc
Imec
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Yang Jinfeng
Sumitomo Heavy Industries Ltd.
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Yang J
Department Of Ee University Of South Carolina
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MERTENS Paul
IMEC
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HEYNS Marc
IMEC
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Hatcher Zach
Ashland Chemical
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Mertens P
Interuniversity Microelectronics Center
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Heyns M
Interuniv. Microelectronics Center Leuven Bel
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Yang J
Ipec
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Schmidt Harald
IMEC
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Rotondaro Antonio
IMEC
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Hurd Trace
Texas Instruments
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ZHONG Lei
IPEC
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YANG Jerry
IPEC
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HOLLAND Karey
IPEC
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GRILLAERT Joost
IMEC
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DEVRIEND Katia
IMEC
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HEYLEN Nancy
IMEC
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Hurd Trace
Texas Instruments:(present Address)imec
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Meuris M
Imec
著作論文
- H_2O_2 Decomposition and Its Impact on Silicon Surface Roughening and Gate Oxide Integrity
- A Static Model for Scratches Generated during Aluminum Chemical-Mechanical Polishing Process : Orbital Technology