Plasma Conductivity Estimation in Inductively Coupled Electrodeless Discharge by Equivalent Circuit
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-08-15
著者
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WATANABE Yoshio
Department of Pediatric Surgery, Nagoya University Graduate School of Medicine
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Tamura K
Japan Atomic Energy Res. Inst. Ibaraki Jpn
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YASUDA Makoto
Heating and Lighting Div., Hitachi, Ltd.
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TAMURA Kouyou
Department of Electrical Engineering, Faculty of Engineering, Kanagawa University
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Tamura Kouyou
Department Of Electrical Engineering Faculty Of Engineering Kanagawa University
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Watanabe Yoshio
Department Of Agricultural Chemistry Kyushu University
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Yasuda Makoto
Heating And Lighting Div. Hitachi Ltd.
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