Behavior of Oxide Precipitates in Czochralski Silicon during Crystal Growth
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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Kobayashi S
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology(aist)
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Kobayashi Sumio
Sumitomo Metal Ind. Ltd.
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SUEOKA Koji
Sumitomo Metal Ind. Ltd.
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IKEDA Naoki
Sumitomo Metal Ind. Ltd.
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YAMAMOTO Toshiro
Sumitomo Metal Ind. Ltd.
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