Heteroepitaxial Growth of Tungsten Carbide Films on W (110) by Plasma-Enhanced Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-07-15
著者
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Katoh M
Univ. Tsukuba Ibaraki Jpn
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KAWARADA Hiroshi
Department of Electrical Engineering, Faculty of Engineering, Osaka University
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Katoh M
R&d Division Tokyo Tungsten Co. Ltd.
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KATOH Masahiro
R&D Division, Tokyo Tungsten Co., Ltd.
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Kawarada Hiroshi
Department Of Electronics And Communication Engineering Waseda University
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