Transparent Conducting Boron-Doped Zinc Oxide Films Deposited by DC-Magnetron Sputtering in B_2H_6-Ar Mixtures
スポンサーリンク
概要
- 論文の詳細を見る
Transparent conducting ZnO:B films for solar cells were produced by DC magnetron sputtering in B_2H_6-Ar mixtures. Low-resistivity textured films could be obtained at relatively low substrate temperatures of 150-200℃. The resistivity, electron mobility and carrier concentration were 4×10^<-4>Ωcm, 60 cm^2/Vs and 2×10^<20>cm^<-3>, respectively. The 2-μm-thick films showed a sheet resistance of 2Ω/sq and optical transmission of greater than 85% at wavelengths of 0.6-1.0μm. These films exhibited higher optical transmission in the near infrared region than ZnO:Al films with the same resistivity because of high electron mobility. No degradation of resistivity and optical transmission was observed after exposure at 85℃ and 95% RH for 5 h.
- 社団法人応用物理学会の論文
- 1995-07-15
著者
-
Kunioka Akio
Department Of Electric Engineering And Electronics Aoyama Gakuin University
-
Nakada Tokio
Department Of Dermatology Showa University School Of Medicine
-
OHKUBO Yukiyasu
Department of Electrical Engineering and Electronics, Aoyama Gakuin University
-
MURAKAMI Naoki
Department of Electrical Engineering and Electronics, Aoyama Gakuin University
-
Murakami Naoki
Department Of Electrical Engineering And Electronics Aoyama Gakuin University
-
Ohkubo Yukiyasu
Department Of Electrical Engineering And Electronics Aoyama Gakuin University
関連論文
- Erythema multiforme, Stevens-Johnson syndrome and toxic epidermal necrolysis : Frozen-section diagnosis
- Effects of Sodium on CuIn_3Se_5 Thin Film
- Photoluminescence Properties of Sodium Incorporated in CuInSe_2 Thin Films
- High-Temperature Degradation Mechanism of Cu(In,Ca)Se_2-Based Thin Film Solar Cells
- Angiosarcoma (Stewart-Treves syndrome) : Palliative role of Mohs' ointment
- Properties of Schottky Barriers on p-Type Indium Phosphide
- InP (MIS) Schottky Barrier Solar Cells : III-4: III-V COMPOUND SOLAR CELLS AND DETECTORS
- Instability Observed in InP (MIS) Schottky Barrier Solar Cells : II-1: COMPOUND SEMICONDUCTOR SOLAR CELLS (I)
- Preparation of a Thin Silicon Nitride Layer by Photo-CVD and Its Application to InP MISFET's
- Electrical and Optical Properties of CdO-Si Junctions
- Electrical and Optical Properties of Sputtered CdO Films
- Autopsy case of CD4^-/CD8^- cutaneous T-cell lymphoma presenting disseminated pagetoid reticulosis with aggressive granulomatous invasion to the lungs and pancreas
- Microstructural Characterization for Sputter-Deposited CuInSe_2 Films and Photovoltaic Devices
- The Growth of CuInSe_2 Films Deposited by Sputtering and Its Application to Solar Cells
- Polycrystalline CuInSe_2 Thin Films for Solar Cells by Three-Source Magnetron Sputtering
- Effect of Water Vapor on the Growth of Textured ZnO-Based Films for Solar Cells by DC-Magnetron Sputtering
- Effect of Potassium on Crystal Modification of rf-Sputtered HgS Films
- Chalazion masquerading as sporotrichosis
- High Mobility Titanium-Doped In2O3 Thin Films Prepared by Sputtering/Post-Annealing Technique
- Effects of Sodium on Cu(In, Ga)Se_2-Based Thin Films and Solar Cells
- Sequential Sputtering/Selenization Technique for the Growth of CuInSe_2 Thin Films
- Polycrystalline Thin-Film TiO_2/Se Solar Cells
- Superconducting Y_1Ba_2Cu_3O_ Films Prepared by the Dip-Coating Technique on MgO Substrates : Electrical Properties of Condensed Matter
- Performance and Loss Analyses of High-Efficiency Chemical Bath Deposition (CBD)-ZnS/Cu(In_Ga_x)Se_2 Thin-Film Solar Cells : Semiconductors
- Efficient ITO/Se Heterojunction Solar Cells
- Cu(In_,Ga_x )Se_2-Based Thin Film Solar Cells Using Transparent Conducting Back Contacts
- Superstrate-Type Cu(In, Ga)Se_2 Thin Film Solar Cells with ZnO Buffer Layers
- High-Efficiency Selenium Photovoltaic Solar Cells : I-3: NEW STRUCTURE AND ADVANCED MATERIAL (1)
- Effects of Postdeposition Annealing on Electrical Properties of Mo-Doped Indium Oxide (IMO) Thin Films Deposited by RF Magnetron Cosputtering
- Preparation and Electrical Properties of Evaporated β-HgS Films
- Transparent Conducting Boron-Doped Zinc Oxide Films Deposited by DC-Magnetron Sputtering in B_2H_6-Ar Mixtures
- Preparation of α-HgS Films by rf-Sputtering
- Growth and Properties of Sputter-Deposited α-HgS Films in Hg Vapor
- Metal patch test results from 1990-2009
- Effects of Postdeposition Annealing on Electrical Properties of Mo-Doped Indium Oxide (IMO) Thin Films Deposited by RF Magnetron Cosputtering
- Effects of Antimony Doping on Cu(In1-x,Gax)Se2 Thin Films and Solar Cells
- Effects of Bi Incorporation on Cu(In1-x,Gax)Se2 Thin Films and Solar Cells
- Wide-Gap Cu(In,Ga)Se2 Solar Cells with Zn(O,S) Buffer Layers Prepared by Atomic Layer Deposition
- Transparent Conducting ZnO:B Thin Films Grown by Ultraviolet Light Assisted Metal Organic Chemical Vapor Deposition Using Triethylboron for Cu(In,Ga)Se2 Solar Cells
- Cd-Free Flexible Cu(In,Ga)Se2 Thin Film Solar Cells with ZnS(O,OH) Buffer Layers on Ti Foils