Effects of Plasma-Substrate Distance on Properties of Hydrogenated Amorphous Silicon Deposited from Hydrogen-Diluted Silane

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-07-15

著者

• HASHIMOTO Kenji

  Department of Oral and Maxillofacial Surgery, Hamamatsu University School of Medicine

• Maki Taisuke

  Department of Chemical Engineering, Graduate School of Engineering, Kyoto University

• Maki Taisuke

  Department Of Chemical Engineering Faculty Of Engineering Kyoto University

• Masuda Takao

  Department of Immuotherapeutics, Tokyo Medical and Dental University, Graduate School

• Masuda Takao

  Department Of Chemical Engineering Faculty Of Engineering Kyoto University

• KAWASE Motoaki

  Department of Chemical Engineering, Faculty of Engineering, Kyoto University

• NAGASHIMA Masayuki

  Department of Chemical Engineering, Faculty of Engineering, Kyoto University

• MIYAMOTO Yasushi

  Future & Frontier Field Research Laboratory, Nippon Steel Corporation

• Kawase Motoaki

  Department Of Chemical Engineering Faculty Of Engineering Kyoto University

• Nagashima M

  Kanazawa Univ. Kanazawa Jpn

• Miyamoto Y

  Future & Frontier Field Research Laboratory Nippon Steel Corporation

• Hashimoto Kenji

  Department Of Biotechnology And Life Science Tokyo University Of Agriculture And Technology

• Hashimoto Kenji

  Department Of Anatomy Nara Medical University

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