Deposition Profile of RF-Magnetron-Sputtered BaTiO_3 Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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ITO Yukio
Central Research Laboratory, Hitachi, Ltd.
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SEKINE Tomoyuki
Department of Physics, Sophia University
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Lee N‐y
Department Of Physics Sophia University
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LEE Nam-Yang
Department of Physics, Sophia University
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UCHINO Kenji
Materials Research Laboratory, Pennsylvania State University
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ICHINO Yusuke
Nagoya University
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Lee Nam-yang
Department Of Physics Sophia University
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Ito Yukio
Central Research Laboratory Hitachi Ltd.
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Ito Y
Fukushima Technol. Center Fukushima Jpn
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Uchino Kenji
Materials Research Laboratory Pennsylvania State University
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Sekine Tomoyuki
Department Of Polymer Chemistry Tokyo Institute Of Technology
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Sekine Tomoyuki
Department Of Physics Faculty Of Science And Technology Sophia University
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Uchino Kenji
Materials Research Institute The Pennsylvania State University
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Ito Yukio
Central Research Laboratory Hitachi Ltd
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