Highly C-Axis-Oriented Pb(Zr, Ti)O_3 Films Prepared by Sputtering : Thin Films
スポンサーリンク
概要
- 論文の詳細を見る
A newly developed tripole magnetron sputtering system, which has a third magnetic pole, has been applied to deposit PZT films in the atomic layer epitaxy mode. A set of experimental results revealed that the resultant films were highly c-axis orientated on (100) MgO substrates and that the deviation from stoichiometry in the films enhanced asymmetric properties of the P-E loop patterns.
- 社団法人応用物理学会の論文
- 1991-09-30
著者
-
Fukami Tatsuo
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
-
MINEMURA Isamu
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
-
Minemura Isamu
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
-
HIROSHIMA Yasushi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
-
Hiroshima Yasushi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
-
Osada Toshiyuki
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, Wakasato, Nagano 382
関連論文
- Localized Polarization in Strontium Titanate Crystal
- Iodine Treatment of GaAs Surface
- Dependence of Resistivity on Donor Dopant Content in Barium Titanate Ceramics
- Anomolous Dielectric Relaxation in Nickel-Doped Barium-Strontium Titanate Ceramics
- Highly C-Axis-Oriented Pb(Zr, Ti)O_3 Films Prepared by Sputtering : Thin Films
- A Loop Tracer for Instantaneous Measurement of Ferroelectric Hysteresis Phenomena : A: APPLICATIONS AND FUNDAMENTALS
- Composition of Reactively Sputtered PLZT Films
- Target Erosion Pattern in Planar Magnetron Sputtering
- TSC Study on Fe-Doped Barium-Strontium Titanate Ceramics : F: Ferroelectric Materials
- Shift of the Lattice Constant of PZT Films through the Post-Deposition Heat Treatment
- Effects of Sputtering Atmosphere Oxygen Pressure on Photocatalytic Phenomena in Anatase Films : Surfaces, Interfaces, and Films
- Ferroelectric Films Deposited by Reactive Sputtering and Their Properties : T: THIN FILM
- Ion-Assisted Deposition of Lead Titanate Thin Films by Controlled-Magnetic Field Sputtering
- Effect of Zr/Ti Ratio on Crystal Structure of Thin Lead Zirconate-Titanate Films Prepared by Reactive Sputtering
- Asymmetric Hysteresis Loops of Ferroelectric PZT Film
- Characterization of KNbO3 Crystal by Traveling Solvent Floating Zone (TSFZ) Method