High-Mobility and High-Stability a-Si:H Thin Film Transistors with Smooth SiN_x/a-Si Interface

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概要

• 論文の詳細を見る

• Through use of an atomic force microscope (AFM), surface morphologies for SiN_x and a-Si:H films were investigated. By controlling deposition conditions, very smooth films have been obtained. The thin film transistor (TFT) with smooth a-Si:H on smooth SiN_x has both high mobility (1.0 cm^2・V^<-1>・s^<-1>) and high stability at the same time. This high-performance TFT will make an important impact in application to high-pixel-density liquid crystal displays (LCDs), such as for use in workstations and high-definition television (HDTV).

• 社団法人応用物理学会の論文
• 1991-12-30

著者

• KANEKO Setsuo

  Functional Devices Research Laboratories, NEC Corporation

• Kaneko Setsuo

  Functional Devices And Material Research Nec Corporation

• TAKECHI Kazushige

  Functional Devices Research Laboratories, NEC Corporation

• NISHIDA Shinichi

  Functional Devices Research Laboratories, NEC Corporation

• Kaneko S

  Functional Devices Research Laboratories Nec Corporation

• UCHIDA Hiroyuki

  Functional Devices Research Laboratories, NEC Corporation

• Nishida Shinichi

  Functional Devices Research Laboratories Nec Corporation

• Takechi Kazushige

  Functional Devices Research Laboratories Nec Corp

• Takechi Kazushige

  Functional Devices Research Laboratories Nec Corporation

• Uchida Hiroyuki

  Functional Devices Research Laboratories Nec Corporation

関連論文

• LCD Legibility as a Function of Resolution (Special Issue on Electronic Displays)
• The Mechanism at Work in 40 MHz Discharge SiH_4/NH_3/N_2 Plasma Chemical Vapor Deposition of SIN_x Films at Very High Rates
• Performance of a-Si:H Thin Film Transistors Fabricated by Very High Frequency Discharge Silane Plasma Chemical Vapor Deposition
• A 33-cm-Diagonal High-Resolution TFT-LCD with Fully Self-Aligned a-Si TFTs (Special Issue on Liquid-Crystal Displays)
• Ultra-High-Resolution TFT-LCDs and Their Technologies (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
• High-Mobility and High-Stability a-Si:H Thin Film Transistors with Smooth SiN_x/a-Si Interface
• Special Issue on Electronic Displays(Special Issue on Electronic Displays)
• Ultra-High-Resolution TFT-LCDs and Their Technologies
• Electrical Instability of Hydrogenated Amorphous Silicon Thin-Film Transistors for Active-Matrix Liquid-Crystal Displays
• Performance of a-Si:H Thin Film Transistors Fabricated by Very High Frequency Discharge Silane Plasma Chemical Vapor Deposition

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