A 33-cm-Diagonal High-Resolution TFT-LCD with Fully Self-Aligned a-Si TFTs (Special Issue on Liquid-Crystal Displays)
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概要
- 論文の詳細を見る
A 33-cm-Diagonal High-Resolution (1280×1024×RGB, which stands for red, green, and blue) TFT-LCD with low, uniform parasitic capacitance between gate electrodes and source/drain electrodes has been developed using Fully Self-Aligned a-Si TFTs. The fabricated TFT-LCD shows no visible seams between block shot exposure regions, even in the display of gray images. In this paper, we describe (1) our full self-alignment technology for the TFTs, including the fabrication process and the technology for reducing OFF current in the TFTs under illumination, (2) SPICE simulation for estimating pixel voltage shift in the fabricated TFT-LCD, and (3) performance results for the fabricated TFT-LCD.
- 社団法人電子情報通信学会の論文
- 1996-08-25
著者
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IKEDA Naoyasu
Functional Devices Research Laboratories, NEC Corporation
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Ikeda N
National Institute For Materials Science
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Hirano N
Yokohama National Univ. Yokohama‐shi Jpn
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Ikeda Naoyasu
Functional Devices Research Laboratories Nec Corporation
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HIRANO Naoto
Functional Devices Research Laboratories, NEC Corporation
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NISHIDA Shinichi
Functional Devices Research Laboratories, NEC Corporation
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KANEKO Setsu
Functional Devices Research Laboratories, NEC Corporation
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Nishida Shinichi
Functional Devices Research Laboratories Nec Corporation
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Hirano Naoto
Functional Devices Research Laboratories Nec Corporation
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Ikeda N
Nec Corp. Kawasaki‐shi Jpn
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