Epitaxial Growth of High Quality Diamond Film by the Microwave Plasma-Assisted Chemical-Vapor-Deposition Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-01-20
著者
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Fujimori Naoji
Itami Research Laboratories, Sumitomo Electric Industries, Ltd.
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Shiomi H
Sumitomo Electric Ind. Ltd. Hyogo Jpn
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Shiomi Hiromu
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Fujimori N
Sumitomo Electric Ind. Ltd. Hyogo Jpn
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Fujimori Naoji
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Nishibayashi Y
Sumitomo Electric Industries Ltd. Hyogo
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Nishibayashi Yoshiki
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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TANABE Keiichirou
Itami Research Laboratories, Sumitomo Electric Industries, Ltd.
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Tanabe Keiichirou
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Fujimori Naoji
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Nishibayashi Yoshiki
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Shiomi Hiromu
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
関連論文
- YBa_2Cu_3O_ Thin Film Prepared by Laser Ablation
- Properties of Boron-Doped Epitaxial Diamond Films
- High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure
- Electroluminescent Device Made of Diamond
- Characterization of Boron-Doped Diamond Epitaxial Films
- High-Voltage Schottky Diodes on Boron-Doped Diamond Epitaxial Films
- Epitaxial Growth of High Quality Diamond Film by the Microwave Plasma-Assisted Chemical-Vapor-Deposition Method
- Field-Effect Transistors using Boron-Doped Diamond Epitaxial Films
- Epitaxial Growth of CdTe by H_2 Sputtering : Semiconductors and Semiconductor Devices
- Deposition of Hydrogenated Microcrystalline Films of CdTe by Chemical Sputtering in Hydrogen : Surfaces, Interfaces and Films
- Epitaxial Growth of CdTe on InSb(100) by RF Sputtering
- Properties of Amorphous Silicon Nitride Prepared at High Deposition Rate
- Epitaxially Grown Diamond (001) 2×1/1×2 Surface Investigated by Scanning Tunneling Microscopy in Air
- Diels-Alder Reaction on the Clean Diamond (100) 2×1 Surface
- Surface Phonons, Electronic Structure and Chemical Reactivity of Diamond (100)(2×1) Surface
- Twinning Structure and Growth Hillock on Diamond (001) Epitaxial Film
- Reactive Ion Etching of Diamond in O_2 and CF_4 Plasma, and Fabrication of Porous Diamond for Field Emitter Cathodes
- Y-Ba-Cu-O Thin Film on Si Substrate : Electrical Properties Condensed Matter
- Growth Rate and Surface Morphology of Diamond Homoepitaxial Films on Misoriented (001) Substrates
- Electrical Characteristics of Metal Contacts to Boron-Doped Diamond Epitaxial Film