Electrical Characteristics of Metal Contacts to Boron-Doped Diamond Epitaxial Film
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概要
- 論文の詳細を見る
Current-voltage characteristics have been obtained for various metal contacts formed on boron-doped diamond epitaxial film prepared on synthesized Ib diamond by the microwave plasma-assisted chemical vapor deposition method. Ti contacts and W contacts have exhibited good ohmic and Schottky properties, respectively. For the first time, we have fabricated Schottky diodes on boron-doped diamond epitaxial films using these contacts and investigated their properties.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-05-20
著者
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Shiomi Hiromu
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Fujimori Naoji
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Nishibayashi Yoshiki
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Imai Takahiro
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Nakahata Hideaki
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Fujimori Naoji
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Nishibayashi Yoshiki
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
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Shiomi Hiromu
Itami Laboratory, Sumitomo Electric Industries, Ltd., 1-1-1, Koyakita, Itami, Hyogo 664
関連論文
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- Low-Loss Diamond Surface Acoustic Wave Devices Using Small-Grain Poly-Crystalline Diamond
- High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure
- Characterization of Boron-Doped Diamond Epitaxial Films
- High-Voltage Schottky Diodes on Boron-Doped Diamond Epitaxial Films
- Epitaxial Growth of High Quality Diamond Film by the Microwave Plasma-Assisted Chemical-Vapor-Deposition Method
- Field-Effect Transistors using Boron-Doped Diamond Epitaxial Films
- Epitaxially Grown Diamond (001) 2×1/1×2 Surface Investigated by Scanning Tunneling Microscopy in Air
- Diels-Alder Reaction on the Clean Diamond (100) 2×1 Surface
- Surface Phonons, Electronic Structure and Chemical Reactivity of Diamond (100)(2×1) Surface
- Twinning Structure and Growth Hillock on Diamond (001) Epitaxial Film
- Reactive Ion Etching of Diamond in O_2 and CF_4 Plasma, and Fabrication of Porous Diamond for Field Emitter Cathodes
- Y-Ba-Cu-O Thin Film on Si Substrate : Electrical Properties Condensed Matter
- Accurate Determination of Density and Energy Level of B Acceptor in Diamond from Temperature Dependence of Hole Concentration
- Growth Rate and Surface Morphology of Diamond Homoepitaxial Films on Misoriented (001) Substrates
- Electrical Characteristics of Metal Contacts to Boron-Doped Diamond Epitaxial Film