Optical Properties and Growth Process of Thin Copper Films on Glass Substrate Studied by In-Situ Ellipsometry
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-02-15
著者
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MIZOGUCHI Tadashi
Faculty of Pharmaceutical Sciences, Osaka University
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Mizoguchi Tadashi
Faculty Of Science Gakushuin University
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Mizoguchi T
Faculty Of Science Gakushuin University
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Kawagoe Takeshi
Faculty Of Science Gakushuin University
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Mizoguchi Tadashi
Faculty Of Pharmaceutical Sciences Osaka University
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MIZOGUCHI Tadashi
Faculty of Science, Gakushuin University
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