Measurement of Energy Distribution of Low Energy Light Ions through Copper Film and its Statistical Analysis

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概要

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• Energy distributions of protons and helium ions passing through copper films of thicknesses from 300 to 800 Å have been measured in the energy range 4 to 16 keV, and the variation of the full width at half maximum with film thicknesses and average ion energies has been investigated. It is found that this width increases slightly with increasing film thickness and increases in a parabolic form with increasing average ion energy. Those experimental results are analyzed by the statistical procedure of the multiple inelastic collision in which the unevenness of film thickness is taken into consideration, and further, the inelastic scattering process is discussed.

• 社団法人応用物理学会の論文
• 1976-09-05

著者

• KIYONO Setsuo

  Department of Applied Physics, Faculty of Engineering, Tohoku University

• NOMURA Akio

  Department of Information Engineering, Faculty of Engineering, Shinshu University

• Nomura Akio

  Department Of Applied Physics Faculty Of Engineering The University Of Tohoku

• Kiyono Setsuo

  Department Applied Physics Faculty Of Engineering Tohoku University

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