A New Gas Etching Method for Vapor Growth of GaAs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1972-01-05
著者
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SAITO TAKESHI
Central Research Laboratories
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Nozaki Tadatoshi
Central Research Laboratories Nippon Electric Co. Ltd.
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- Si Ion Implantation into GaAs
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