Properties of FexC100-x Thin Films Prepared by Pulsed Filtered Vacuum Arc Deposition (第7回アジア情報記録技術シンポジウム〔英文〕)
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概要
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In this work, Fe-C thin films of various compositions were prepared by pulsed filtered vacuum arc deposition. The composition and thickness of the Fe_xC_<100-x> films were determined by non-Rutherford backscattering spectrometry. The structures and magnetic properties were studied using x-ray diffraction, transmission electron microscopy, x-ray photoelectron spectroscopy, atomic force microscopy, magnetic force microscopy, and vibrating sample magnetometry. The resistivity was measured by the four contact technique from 20K to 300K. Thermal annealing was performed in vacuum for 1 h at various temperatures ranging from 200 to 500℃. The dependence of the structures and properties on composition and annealing conditions were studied. For the as-deposited film with a particular composition of Fe_<90>C_<10>, it showed an amorphous structure and soft magnetic properties with a high saturation magnetization of 1550 emu/cm^3, a small coercivity of 7 Oe and a moderate resistivity of 90 μΩ-cm at room temperature.
- 社団法人映像情報メディア学会の論文
- 2002-11-08
著者
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Wong S.p.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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WONG S.
Department of Computer Science and Information Systems, University of Hong Kong
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Ke N
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Wong S.
Department Of Chemistry The University Of Western Ontario
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Cheung W.y.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Cheung W.
Department Of Electronic Engineering & Materials Science And Technology Research Centre The Chin
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Ke N.
Department of Electronic Enginneering The Chinese University of Hong Kong
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Chiah M.f.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Wang H.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Ke N.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Poon C.
Department of Electronic Engineering & Materials Science and Technology Research Centre, The Chinese
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Chiah M.
Department of Electronic Engineering & Materials Science and Technology Research Centre, The Chinese
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Poon C.y
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
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Poon C.
Department Of Electronic Engineering & Materials Science And Technology Research Centre The Chin
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Poon C.
Department Of Computer Science University Of Hong Kong
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Wang H.
Department Of Anatomy And Cell Biology The George Washington University Medical Center
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Cheung W.
Department Of Biology The Chinese University Of Hong Kong
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