Pulsed filtered vacuum arc deposition of ta-C films (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)
スポンサーリンク
概要
- 論文の詳細を見る
Tetrahedral amorphous carbon (ta-C) films were prepared using a pulsed filtered vacuum arc deposition system at various substrate bias voltages. The Raman results confirmed that these ta-C films exhibited high sp^3 fraction of over 80%. The hardness, elastic modulus and compressive stress of the films were up to 47 GPa, 261 GPa and 17 GPa, respectively. The friction coefficient and wear rate of the films were as low as 〜0.085 and 4_x10^<-8> nm^3N^<-1>m^<-1>. The thermal stability of these films after vacuum annealing was also studied. The Raman results showed that the sp^3 fraction remained to be higher than 80% even after RTA at 900℃, meanwhile photoelasticity results showed that there was significant stress relaxation after annealing.
- 社団法人映像情報メディア学会の論文
- 2000-11-14
著者
-
Wong S.p.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
-
Ke N
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
-
Wong S.
Department Of Chemistry The University Of Western Ontario
-
Cheung W.y.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
-
Cheung W.
Department Of Electronic Engineering & Materials Science And Technology Research Centre The Chin
-
Ke N.
Department of Electronic Enginneering The Chinese University of Hong Kong
-
Wu X.y.
Department Of Electronic Engineering The Chinese University Of Hong Kong
-
Ke N.
Department Of Electronic Engineering And Materials Science And Technology Research Center The Chines
-
Lau W.f.
Department Of Electronic Engineering The Chinese University Of Hong Kong
-
Wu X.Y.
Institute of Low Energy Nuclear Physics, Beijing Normal University
-
Lau W.
Department Of Chemical Engineering National Universityt Of Singapore
-
Wu Z.
Institute of Low Energy Nuclear Physics, Beijing Normal University
関連論文
- Continuous Dynamic Spinal Motion Analysis
- Apiosordaria striatispora, an endophyte of Mesua ferrea and Prunus arborea from Thailand
- Magnetic Metal Alloy-Carbon Nanocomposite Thin Films by Pulsed Filtered Vacuum Arc Deposition (第7回アジア情報記録技術シンポジウム〔英文〕)
- Magnetic Metal Alloy-Carbon Nanocomposite Thin Films by Pulsed Filtered Vacuum Arc Deposition
- GMR Effects and Domain Structures in Granular Magnetic Thin Films Prepared by Pulsed Filtered Arc Co-Deposition
- Coupling Between Sagittal and Frontal Plane Deformity Correction in Idiopathic Thoracic Scoliosis and Its Relationship With Postoperative Sagittal Alignment
- Monte Carlo modeling of magnetic properties in magnetic granular films for high-density recording (マルチメディアストレージ 第6回アジア情報記録技術シンポジウム〔英文〕)
- Monte Carlo modeling of magnetic properties in magnetic granular films for high-density recording
- Properties of FexC100-x Thin Films Prepared by Pulsed Filtered Vacuum Arc Deposition (第7回アジア情報記録技術シンポジウム〔英文〕)
- Properties of Fe_xC_100-x Thin Films Prepared by Pulsed Filtered Vacuum Arc Deposition
- Characterization of CoPt-C nanocomposite films prepared by pulsed filtered vacuum arc deposition (マルチメディアストレージ 第6回アジア情報記録技術シンポジウム〔英文〕)
- Characterization of CoPt-C Nanocomposite Films Prepared by Pulsed Filtered Vacuum Arc Deposition
- Properties of magnetic metal-carbon nanocomposite films by pulsed filtered vacuum arc deposition (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)
- Pulsed filtered vacuum arc deposition of ta-C films (マルチメディアストレージ--第5回アジア情報記録技術シンポジウム〔英文〕)
- Properties of Magnetic Metal-Carbon Nanocomposite Films Prepared by Pulsed Filtered Vacuum Arc Deposition
- Pulsed Filtered Vacuum Arc Deposition of ta-C Films
- Magnetic Properties and Domain Structures of Co-C Nanogranular Films Prepared by Pulsed Filtered Vacuum Arc Deposition (第4回アジア情報記録技術シンポジウム)
- Magnetic Properties and Domain Structures of Co-C Nanogranular Films Prepared by Pulsed Filtered Vacuum Arc Deposition
- Gonadoblastoma in Patient with Turner's Syndrome
- Use of developmental language scales in Chinese children
- A Comparison of Defect States in Tantalum Pentoxide (Ta_2O_5) Films after Rapid Thermal Annealing in O_2 or N_2O by Zero-Bias Thermally Stimulated Current Spectroscopy
- GMR Effects and Domain Structures in Granular Magnetic Thin Films Prepared by Pulsed Filtered Arc Co-Deposition
- A Comparative Study on the Electrical Properties of Amorphous Silicon Thin Films in Light-Induced Crystallization
- Ultrastructural Studies on the Female Reproductive System of the Leafhopper Euscelidius variegatus Kirschbaum(Homoptera : Cicadellidae)II. The vitellarium oocytes and follicular epithelium
- Confirmation of the Correlation between the Electrical Hysteresis and Silicon Dangling Bond Density in Silicon Nitride by UV Irradiation of Nearly Hysteresis Free Metal-Nitride-Silicon Capacitors
- A study of white dermographism in atopic dermatitis
- SIMULATION OF AN INTERNALLY MULTI-STAGED PERMEATION MODULE OPERATING WITH COCURRENT FLOW PATTERN
- The Identification and Suppression of Defects Responsible for Electrical Hysteresis in Metal-Nitride-Silicon Capacitors