マイクロ放電による溶融現象 : 微細電極を用いる放電とそれによるマイクロ溶融現象(第2報)

概要

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Micrometer sized melting process is available to micro-welding for manufacturing microme chanical systems. This report describes an in-situ observation of the micrometer sized melting phenomena by micro-discharge with a thin tungsten (W) electrode in a SEM vacuum environment. By the cathode electrode a melting spot can be formed on the surface of the specimen. Diameters of melting spots depend on the amount of discharge energy. Consequently, in the range of 1 μm to 10 μm, the diameter of a melting spot can be controlled by selecting the pulse condition. Additionally, a weld bead like melted-zone can be formed by applying repeated pulsed voltage between an electrode and a specimen.The width of a melted-zone depends on pulse voltage, pulse width, repetition frequency, and traveling velocity of an electrode.
社団法人溶接学会の論文
1995-02-05