サブミクロンオーダーの微小ギャップ中の放電現象 : 微細電極を用いる放電とそれによるマイクロ溶融現象(第1報)

概要

論文の詳細を見る
Micro-discharge phenomena is experimentally investigated in vacuum environment.The experimental setup based on a STM (ScanningTunneling Microscope), which is consisted of electric circuit for micro-discharge and nanometer controlled actuators for adjusting gap length, was constructed. In order to carry out the in-situ observation of micro-discharge phenomena it was installed in a SEM (Scanning Electron Microscope) chamber fitted with a photomultiplier. Applying several hundereds voltages to the gap between the electrode and the specimen at a distance of several hundreds nanometers, the electrical breakdown followed by micro-discharge occurs. Light emission was simultaneously detected with photomultiplier.It was found that the micro-discharge voltage falls with increasing current.
社団法人溶接学会の論文
1994-11-05