反応層制御によるSi_3N_4と金属の接合強さの改善要因 : ファインセラミックスと金属の接合強さの支配要因(第2報)

概要

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Factors affecting the bonding strength of Si_3N_4-metals joints were discussed through examining the causes for improvement in tensile strength of Si_3N_4-molybdenum joints by controlling the reaction layer thickness using Cu-5%Cr, Cu-1%Nb and Cu-3%V insert metals. Microstructures of reaction layers being thinner than the optimum thickness were almost homogeneous and the interfaces between Si_3N_4 and the reaction layers were still smooth. Defects such as porous zone and crack occurred in the reaction layers thickening than the optimum thickness, while the asperity of the interface became larger. The insufficient reactivity of insert metals against Si_3N_4 substrate provided the planar fracture at the interface between Si_3N_4 and the reaction layer and followed to diminish the bonding strength. The fracture in the reaction layer was due to the defects in the reaction layer and as a result, the bonding strength was deteriorated again.
1993-05-05