超磁歪薄膜の力センサへの応用 : センサ・計測

概要

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We studied a giant magnetostrictive thin film for use in high-sensitivity microsensors and microactuators. It is important to have even lower magnetic coercive force for the sensor application. We, therefore, aimed to decrease the magnetic coercive force by selecting an appropriate ratio of Tb(RE)-Fe(TM) alloys. The resulting giant magnetostrictive thin film was applied to a force sensor with a meander coil. This paper describes the following : (1) The influence on magnetic characteristics of magnetron-sputtered film by sputtering condition is described for the force sensor ; (2) the magnetostriction of the film showed 702 ppm at 80 kA/m when processed at the appropriate annealing temperature ; (3) we constructed the force sensor with a meander coil and the thin film was used for the sensor ; (4) a change in impedance of 7% was observed on the meander coil. We have shown the possibility of using this design as a sensor.
社団法人日本磁気学会の論文
2002-04-01