磁気転写特性に及ぼすマスター媒体構造の影響(磁気記録媒体)

概要

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In the magnetic contact duplication technique using lithographically patterned master media, when the master media have magnetic films not only in protruding parts but also in dented parts, the depth of the dented parts affects the duplication performance. For master media with a pattern width L of 2.5 μm, both experimental and simulation results show that the magnetization duplicated by using the master medium without magnetic films at the dented parts is reversed at transitions and is almost uniform between transitions, and that the magnetization duplicated by using the master medium with magnetic films at 0.5 μm-deep dented parts is not only reversed at transitions but also changes between transitions. It is inferred from simulation that for master media with L of 0.1 and 0.4 μm, if d is 0.1 and 0.2 μm, respectively, magnetic films at the dented parts have no influence on the duplication performance.
社団法人日本磁気学会の論文
2003-04-01