1032 配向制御 TiN 硬質被膜の AFM によるトライボロジー特性評価

概要

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Owing to the hardness and mechanical stability of thin hard coatings, they have a wide range of applications. TiN coatings have been used as a wear resistant coating. The aim of this study is to research the frictional properties of TiN coatings with the preferred orientation of grains controlled by changing the substrate bias voltage. TiN coatings with a film thickness of 3μm are deposited on the substrate (SKD11) with the hardness of HV450 by PVD arc ion plating process. In these experiments, the substrate bias voltage is varied in the range of -20 to -200V. The orientation of TiN coatings is measured using X-ray diffraction. With increasing bias voltage, the preferred orientation of grains change from (200) orientation produced at -20 and -50V to (111) orientation produced at -100,-150,-200V. After the deposition, the coated disks are polished to controlled a same surface roughness (Ra≒0.02μm). The friction force at nano-scale is measured using atomic force microscope (AFM) to research the adhesion force between the coated disc and the ball. For the friction force at nano-scale, the specimens coated at -150 and -200V have better tribological properties than those do at -20 and -50V.
社団法人日本機械学会の論文
2002-09-20