317 PVD 法による TiN 硬質薄膜の密着度の新しい測定

概要

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In order to improve the tribological and mechanical properties of machine parts, surface modification methods adopted in a wide range of applications. For example, TiN coating has been used as a wear-resistant coating. In this paper, TiN films are deposited by physical vapor deposition (PVD) especially are ion plating. The principal advantage of this method is to deposit coatings at lower temperature. The aim of this study is to investigate the adhesion of PVD hard coatings. New indentation tester with acoustic emission sensor is made to measure the adhesion and fatigue property of the coatings. TiN films are deposited on the WC substrate. In these experiments, deposition time is changed in the range of 5min to 35min to control the several film thicknesses and bias voltage was changed in the range of -50V to -200V. indentation test, repeated load test and SEM observations of the surfaces of them are carried out, then these results are compared.
社団法人日本機械学会の論文
2003-10-17