1031 PVD 法により成膜した TiN 硬質被膜の残留応力の測定

概要

論文の詳細を見る
To improve tribological and mechanical properties of machine parts, surface modification methods have a wide range of applications. For example, TiN coating has been used as wear-resistant coating. In this paper, TiN coatings deposited by physical vapor deposition (PVD), especially arc ion plating method are investigated. The principal advantage of this method is to deposit coatings at lower temperature. The residual stress is generated in coatings during PVD process, and affects the adhesion between film and substrate. In this study, the residual stress in TiN coatings deposited by PVD arc ion plating process is measured. TiN coatings are deposited on several substrates (SKH59,SKD11,and WC). The substrate bias voltage is varied in the range of -50 to -200V. Residual stress is measured by X-ray diffraction (XRD) using sin^2φ method. The microhardness and the scratch critical load are measured using microvickers tester and scratch tester, respectively. Residual stress depends on the coating process parameters and the substrates.
社団法人日本機械学会の論文
2002-09-20