103 配向制御したTiN改質材のトライボロジー特性(表面改質の技術と特性(1))(OS.10 表面改質の技術と特性)

概要

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Thin hard coatings have a wide range of applications owing to the hardness and the mechanical stability. For example, TiN coating has been used as a wear resistant coating. Tribological properties of PVD coatings produced by an arc ion plating process have been studied. The principal advantage of this method is to deposit coatings at lower temperature. The purpose of this study is to research the influence of substrate bias voltage to tribological properties of TiN coatings. TIN coatings with a film thickness of 3μm are deposited on the substrate (SKD11) by PVD arc ion plating process. The substrate bias voltage is varied in the range of -20 to -200V. The phase composition of TiN coatings is studied using X-ray diffraction (XRD). The microhardness and the scratch critical load are studied using microvickers tester and scratch tester, respectively. The coefficient of friction and the wear rate are measured using ball-on-disc tester. It is found that tribological properties of TiN coatings depend on the substrate bias voltage.
社団法人日本機械学会の論文
2001-03-09