S0402-1-2 押込み-AE法によるSi含有量を変化させたDLC-Si皮膜の密着度測定(表面改質および薄膜コーティング)

概要

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Adhesion of DLC-Si hard coating parts with different contents of Si is evaluated using a new developed Indentation-AE method. Two specific AE signals for each specimen are recorded during indentation. The critical loads are determined by the two specific signals named as a first signal and a second signal. The critical load determined by the first signal increases with increasing content of Si. On the other hand, the critical load determined by the second signal decreases with increasing content of Si. From the surface observation of the DLC-Si hard coaling, the occurrence cause of the first signal is estimated due to the delamination at the interface between the DLC-Si hard coating and the substrate and that of the second signal is understood due to the crack of the DLC-Si hard coating film. The two specific adhesion properties of DLC-Si hard coating parts can be evaluated using the new developed Indentation-AE method.
2009-09-12