102 基材強度の異なるTiN改質材の密着強度特性(表面改質の技術と特性(1))(OS.10 表面改質の技術と特性)

概要

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The mechanical properties of TiN thin hard film deposited on SKD11 substrate using are ion plating PVD process are measured by the scratch test, micro-hardness test and profile meter. The experiments are carried out to create thin hard coating on substrate by the arc ion PVD process. Coating material is TiN. Substrate material is SKD11 with different hardness. In order to improve critical normal force, process parameters such as arc current and bias voltage are changed and multi-layer coatings are produced. The critical normal force is measured by the scratch test. The obtained results are as follows. With increase of the thickness of coating, and with increase of the hardness of substrate, the critical normal force of coating increased. The multi-layered with Ti-TiN coating have been improved critical normal force higher than single TiN coating on SKD11 with HV450.
社団法人日本機械学会の論文
2001-03-09