910 Ti-Ni 合金スパッタ薄膜を用いたマイクロアクチュエータの基本特性に及ぼす熱処理の効果

概要

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Ti-Ni shape memory alloy thin films are considered to be an attractive material for fabricating microactuators. The r.f. magnetron sputtering method was used to fabricate the Ti-Ni thin films. The thin film was deposited on a Si substrate covered with oxide layers. To clarify the effect of heat-treatment on the actuator characteristics, three Si chips with Ti-Ni thin films were heat-treated at different temperatures. Diaphragm type microactuators were fabricated by an anisotropic etching method after heat-treatment at 773K, 873K and 973K, respectively. In order to evaluate the characteristics of each microactuator, a laser beam was used to measure the shape of the actuators at various temperatures upon cooling and heating.
一般社団法人日本機械学会の論文
2000-07-31