229 微粒メタルボンドダイヤモンドホイールの精密ツルーイングと脆性材料の延性モード研削への適用(OS5 電子部品・光学部品の超精密加工)

概要

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As a means to apply the electrocontact discharge truing (ECDT) utilizing a cup-shaped single electrode to a fine-grained metal-bonded diamond grinding wheel, a method in which the electrode is tilted against the working surface of the grinding wheel in order to form the axial profile of the grinding wheel as an envelope of circular arcs is proposed. By using this method, the axial profile with the flatness of sub-micrometer can be obtained as well as the slightly tapered axial profile. From the experimental results of the surface grinding of quartz glass, it is confirmed that the precision topography of the grinding wheel surface trued by this method contributes to the high quality grinding of hard and brittle materials.
2001-11-20