ターボ分子真空ポンプ内流れの二次元数値シミュレーション : 流体工学,流体機械

概要

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The flow field in the turbo-molecular pump is numerically analyzed by the Direct-Simulation-Monte-Carlo method. The two dimensional simulation shows these results : 1) Even at the steady state of the pump, some unsteady now exists at the area between the rotor and stator. 2) In the pump with a rotor stage and a stator stage, the relative velocity is not similar because of the boundary condition of discharge side. 3) The maximum pressure ratio is effected by the time-averaged flow in the pump. 4) Intermolecular collision makes the maximum pressure ratio small at Kn < 10, but the discharge time is not affected by the molecular collision. 5) In the pump with many stages, the flow becomes almost similar when the shape of blades are same.
社団法人日本機械学会の論文
2001-09-25