磁気ヘッドスライダ浮上量の光学的測定原理誤差を排除した測定値に基づくスライダ浮上解析法の精度検証

概要

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In order to examine the validity of numerical calculation methods for flying characteristics of magnetic head sliders, several experiments were performed under normal and reduced ambient pressure conditions. The measured slider flying height was corrected to take into account the Zero-spacing error, an error caused by the phase shift of reflected light from a slider surface. This corrected measured flying height was then compared with the simulated flying height calculated using a modified Reynolds equation and a linearized Boltzmann equation. Applying the linearized Boltzmann equation method, in the examined range of high flying heights, the experimentally-measured flying height was in complete agreement with the simulated flying height. Furthermore, the correction taking into account the Zero-spacing error did not increase the difference between the lower measured and calculated flying heights. The linearized Boltzmann equation method is the more accurate means of predicting the ultrathin spacings where the Knudsen number is less than 6, i. e., where the spacing is more than 0.01μm under atmospheric pressure.
一般社団法人日本機械学会の論文
1994-08-25