非接触磁気浮上テーブルのアクチュエータの開発と振動絶縁制御

概要

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This paper proposes a drag-force-type magnetic levitation actuator consisting of pairs of permanent magnets and electromagnets. For general magnetic levitation actuators, there is a nonlinear relationship between magnetic force and control current, so that a linear control theory is not applicable. In the actuator proposed, the relationship between the force and the current is linear. This implies that the position and velocity feedback controls can be applied without consideration of interferences. A control method using a combination of techniques of disturbance cancellation and optimal regulation was presented taking into consideration the interference between perpendicular and vertical motions. To verify the applicability of present actuator and control method, experimental tests were carried out.
一般社団法人日本機械学会の論文
1995-04-25