Al_2Cl_3とNH_3の気相反応によるAlN微粉末の合成

概要

論文の詳細を見る
Fine AIN powder was synthesized by vapor phase reaction of AlCl_3 and NH_3 at 720°-1190℃. Most of the powder deposited separately in two regions in the reactor. The powder deposited in the range between the end of AlCl_3-feeding tube and the point 17 cm apart there from consisted of one phase AIN. The particle-size and its distribution became fine and uniform at high reaction temperature or at high total flow rate of NH_3 and N_2 Fine powder with the median diameter of 0.1 6 μm was synthesized at 1190℃ and particles were within a narrow range from 0.1 to 3.O μm. In the range between 20 and 33 cm apart from the end of the AlCl_3-feeding tube, amorphous AIN deposited, which crystallized on heating at 1400℃. By-product, NH_4Cl which coexisted with amorphous ALN, was easily eliminated by heating at 500℃. The formation rate of crystalline AIN was 2.2g・h^<-1> and the total yield of crystalline and amorphous ALN was 79%.
社団法人日本セラミックス協会の論文
1988-02-01