複合アルコキシド法によるBa_xSr_<1-x>TiO_3薄膜の合成

概要

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High dielectric barium-strontium-titanate (Ba_<0.5>Sr_<0.5>)TiO_3 (BST) thin films were fabricated by a spin-coating technique. The fabrication process consisted of three steps. First, a complex alkoxide was synthesized from barium, strontium and Ti-alkoxide (titanium tetraethoxide) in 2-methoxyethanol at 125℃ for 3h. Then, hydrolysis and condensation reactions of the complex alkoxide were carried out at 75℃ in 2-methoxyethanol containing nitric acid as a catalysis. Finally, the sols obtained by hydrolysis and condensation of Ba-Sr-Ti complex alkoxide were castled onto glass substrates. The films were subjected to heat treatment at temperatures between 350 and 900℃. The films started to crystallize into a perovskite structure BST at 500℃ and were well-crystallized at 525-550℃. The BST films that were heat-treated at 550℃ had dielectric constant exceeding 2000 at 800 Hz.
社団法人日本セラミックス協会の論文
1998-11-01