28aZL-12 Generation of electron cyclotron resonance plasma inside the rectangular waveguide by using high power microwave

概要

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The generation of the plasma by electron cyclotron resonance (ECR), a well known techniques, has been increasingly used as an important tools in various purposes. The ECR plasma has high potential due to its wide range of field from nuclear fusion to plasma processing. A new source for the generation of overdense plasma is developed using electron cyclotron resonance (ECR) technique in a rectangular waveguide by a high power (1kW) microwave of frequency 2.45GHz and the characteristics of the plasma for Ar gas are presented. The plasma which is characterized by a high brightness and blue-violet color with a large surface area is found to fill entire the waveguide of length 100cm and its uniformity over 50cm is also noticed. Plasma density about (10)^<12> (cm)^<-3> and the electron temperature 8-12eV are observed with the help of Langmuir probe and their dependence on pressure and the magnetic field are examined. It is shown that these parameters can be controlled by adjusting the pressure, magnetic fields and/or the microwave power. Such a plasma could be useful in plasma processing and in the concept of particle accelerators as well.
2003-03-06