オージェ電子分光法を用いた鋼中析出物分析における空間分解能および軽元素定量の検討(表面分析)(<特集>最先端の化学分析と物理解析)

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The influence of backscattered electrons on the spatial resolution was investigated in the analysis of Auger electron spectroscopy. The size of the generation area of Auger electrons caused by backscattered electron generation was evaluated for Au/SiO_2/Si and Ni/Fe specimens by measuring the line profile of O KLL and Ni LMM, respectively. It was shown that the size of the generation area, measured as the spread till the intensity becomes 5% of its maximum intensity, increased with accelerating voltage and exceeded 1μm for the accelerating voltage of 20 kV. Cosequently, the accelerating voltage should be less than 5 kV for the sub-micron analysis. The sizes of the generation area were in good agreement with the values calculated from the theoretical equation proposed by Soejima. The quantitative analysis of carbon and boron in a borocarbide precipitate in steel was done under the analytical conditions determined for sub-micron analysis. The analytical errors were less than 3 atomic % when the relative sensitivity factors for carbon and boron obtained experimentally from Fe_3C and Fe_2B precipitates were used, respectively. On the other hands, when the relative sensitivity factors obtained from pure materials were used, the analytical accuracy was poor because of the influence of the change of spectrum shape due to the difference of chemical state.
社団法人日本鉄鋼協会の論文
1999-02-01