圧電アクチュエータのオープンループ位置決め(第1報) : ヒステリシスとクリープ低減のための駆動法の基礎特性

概要

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In this paper, non-linear characteristics of a piezoelectric actuator such as hysteresis and creep are investigated experimentally. When the actuator is driven by sinusoidal inputs with different amplitude, upward curves in hysteresis loops of displacement versus input voltage are on the same curve if they are drawn so as to coincide their minimum point in a graph. The curve can be approximated with a polynomial function. Also creep behavior can be reduced by step drive with appropriate overshoot. On the basis of the preceding facts, a new open loop driving method for stack type piezoelectric actuator is proposed for stepwise positioning. In the method, the driving voltage is dropped to 0V and set to a constant value called initial standard voltage before every stepwise drive, and then forwarded to required step height with some overshoot. Influence of both of the hysteresis and creep characteristics are eliminated by the method drastically. Precise stepwise positioning with constant step height is realized under open-loop drive.
2002-04-05