3本の安定化レーザを用いた長尺ブロックゲージ干渉計の開発

概要

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Tue authors have developed a gauge block measurement system where three frequency-stabilized lasers are used as light sources. The stabilized lasers are as follows : I_2-stabilized offset locked He-Ne laser (633 nm), I_2-stabilized Nd : YAG laser (532 nm), and Rb-stabilized diode laser (780 nm). I_2-stabilized offset locked He-Ne laser is commercially available (Nihonkagaku Engineering CO., LTD.) and its relative uncertainty of the wavelength is 2.5×10^<-11>. I_2-stabilized Nd : YAG laser and Rb-stabilized diode laser were developed in our institute and their relative uncertainties of the wavelength are 5×10^<-12>and 1×10^<-9>, respectively. In the measurement system, laser lights were introduced to the interferometer using an optical multi-mode fiber. An interferometric fringe pattern was taken using a CCD camera and the excess fraction parts were calculated from the fringe pattern using the Fourier transform method. This interferometer can measure gauge blocks of up to 1000 mm long and the uncertainty of the interferometer is about 75 nm in 1000 mm gauge block.
社団法人精密工学会の論文
2002-04-05