リチウムタンタレートを用いた小型バイモルフ振動子の共振周波数調整

概要

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A micro bimorph-type resonator, 10 mm in length, 1.014 mm in thickness and 0.97 mm in width, made of 130-degrees-rotated Y-cut lithium tantalate with a large piezoelectric effect and a large Q-factor was developed for use in an angular rate sensor. For a sensor with high sensitivity, the resonant frequency of the driving-mode vibration must correspond to that of the detecting-mode vibration. Therefore, we experimentally adjusted the two resonant frequencies by YAG-laser trimming. This experiment showed that the difference between the two resonant frequencies was 1580 Hz before the adjustment by the YAG-laser trimming but decreased to 5 Hz, at the rate of approximately 18 Hz per microgram of trimmed tantalate, after it. Moreover, it was found that the resonator after the adjustment can vibrate, at the same resonant frequency, without mechanical coupling not only in the driving-mode but also in the detecting-mode. It is thus concluded that such desirable vibration characteristics make the resonator suitable for the sensing element of an angular rate sensor.
2002-01-05